納米技術(shù)中的顯微學(xué)手冊

內(nèi)容概要

現(xiàn)代顯微學(xué)在納米技術(shù)領(lǐng)域的研究和發(fā)展中起到“眼睛”和“手”的功能。迄今，人們?nèi)栽谧巫尾痪氲貙ふ壹{米尺度上的“火眼金睛”。本手冊的目的在于提供關(guān)于各種顯微學(xué)的原理及其在該迅猛發(fā)展的領(lǐng)域內(nèi)應(yīng)用的綜述參考書。本手冊共有22個專題，每一專題都由不同研究領(lǐng)域的、處于世界前沿的科學(xué)家撰寫。本書是第2卷，敘述的是電子顯微學(xué)的內(nèi)容，共有12個專題。本書力圖使讀者對所敘述的方法有一個概念上的理解，而不是只停留在對理論的堆砌上。在每一個專題里，都會敘述相關(guān)的實例及其應(yīng)用并加以討論，使讀者對電子顯微技術(shù)能明了和理解；還會進一步展示各章之間的內(nèi)在聯(lián)系，表明每一種技術(shù)如何在綜合性的、復(fù)雜的測試中各自扮演獨特的角色，解決具體的問題。

書籍目錄

List of Contributors1 High\|Resolution Scanning Electron Microscopy　1.1 Introduction: Scanning Electron Microscopyand Nanotechnology　1.2 Electron\|Specimen Interactions5　　1.2.1 Electron\|Specimen Interactions in Homogeneous Materials　　1.2.2 Electron\|Speciment Interactions in Composite Samples  1.3 Instrumentation of/the Scanning Electron Microscope    1.3.1 General Description　　1.3.2 Performance of a Scanning Electron Microscope　1.4 The Resolution of Secondary and Backscattered Electron Images  1.5 Contrast Mechanisms of SE and BE Images of Nanoparticlesand Other Systems　　1.5.1 Small Particle Contrast in High\|Resolution BE Images　　1.5.2 Small Particle Contrast in High\|Resolution SE Images　　1.5.3 Other Contrast Mechanisms　1.6 Applications to Characterizing Nanophase Materials　1.7 Summary and Perspectives　References2 High Spatial Resolution Quantitative Electron BeamMicroanalysis for Nanoscale Materials　2.1 Introduction 　2.2 The Nanomaterials Characterization Challenge: Bulk Nanostructuresand Discrete Nanoparticles　　2.2.1 Bulk Nanostructures　　2.2.2 Nanoparticles　2.3 Physical Basis of the Electron\|Excited Analytical Spectrometries　2.4 Nanoscale Elemental Characterization with High Electron Beam Energy　　2.4.1 EELS　　2.4.2 X\|ray Spectrometry　2.5 Nanoscale Elemental Characterization with Low and Intermediate Electron Beam Energy　　2.5.1 Intermediate Beam Energy X\|ray Microanalysis　　2.5.2 Low Beam Energy X\|ray Microanalysis: Bulk Nanostructures　　2.5.3 Auger Spectrometry　　2.5.4 Elemental Mapping　2.6 Examples of Applications to Nanoscale Materials　　2.6.1 Analytical Electron Microscopy　　2.6.2 Low Voltage SEM　　2.6.3 Auger/X\|ray SEM　2.7 Conclusions　References3 Characterization of Nano\|Crystalline Materials Using ElectronBackscatter Diffraction in the Scanning Electron Microscope　3.1 Introduction　3.2 Historical Development of EBSD　3.3 Origin of EBSD Patterns　　3.3.1 Collection of EBSD Patterns　　3.3.2 Automated Orientation Mapping　3.4 Resolution of EBSD　　3.4.1 Lateral Resolution　　3.4.2 Depth Resolution　3.5 Sample Preparation of Nano\|Materials for EBSD　3.6 Applications of EBSD to Nano\|Materials　　3.6.1 Heteroepitaxy of Boron Arsenide on \[0001\] 6H\|Sic　　3.6.2 Electrodeposited Ni for MEMS Applications　　3.6.3 Polycrystalline Si For MEMS Applications　3.7 Summary　References4 High Resolution Transmission Electron Microscopy　4.1 HRTEM and Nanotechnology　4.2 Principles and Practice of HRTEM　　4.2.1 Basis of Image Formation　　4.2.2 Definitions of Resolution　　4.2.3 Lattice Imaging or Atomic Imaging　　4.2.4 Instrumental Parameters　　4.2.5 Further Requirements　　4.2.6 Milestones　4.3 Applications of HRTEM　　4.3.1 Semiconductors　　……5 Scanning Transmission Electron Microscopy6 In\|situ Electron Microscopy for Nanomeasurements7 Environmental Transmission Electron Microscopy  in Nanotechnology8 Electron Nanocrystallography9 Tomography Using the Transmission Electron Microscope10 Off\|Axis Electron Holography11 Sub\|nm Spatially Resolved EELS(Electron Energy\|Loss Spectroscopy):Methods,Theory and Applications12 Imaging Magnetic Structures Using TEMIndex

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