微納制造

內(nèi)容概要

納米技術(shù)是當(dāng)前科學(xué)研究與工業(yè)開發(fā)的熱門領(lǐng)域之一。本書全面闡述了微納器件的設(shè)計和制造方面的知識，以及在設(shè)計和制造時所要考慮的諸多因素。書中涵蓋了多種制造技術(shù)，包括微納制造技術(shù)、體和表面微加工技術(shù)、LiGA技術(shù)、薄膜沉積技術(shù)、納加工技術(shù)等。     本書內(nèi)容豐富，講解透徹，是一本相關(guān)領(lǐng)域電子工程師、材料科研工作者開發(fā)微納米材料應(yīng)用的全面的指南，同時也可作為微納米機械和微納米技術(shù)專業(yè)研究生的參考書。

書籍目錄

Preface1. Principles of Micro-and Nanofabrication  1.1 Introduction  1.2 Material Removal Rates  1.3 Conclusions  1.4 Problems  References2. Microfabrication Using X-ray Lithography  2.1 Introduction  2.2 X- ray Lithography  2.3 Synchrotron Radiation  2.4 Microfabrication Process  2.5 Methods of Resist Application  2.6 Exposure  2.7 Problems  References3. Manufacturing High Aspect Ratio Microstructures  3.1 I ntrod uction  3.2 Dry Etching  3.3 Plasma Etching Processes  3.4 Characteristics of the Plasma  3.5 Etching of Microstructures  3.6 Micromachining High Aspect RatioMicrostructures  3.7 Micromolding  3.8 Micromolding Processes  3.9 Micromolding Tools  3.10 Micromold Design  3.11 MicromoldingApplications  3.12 Limitations of Micromolding  3.13 Fabrication of Moving Microstructures  3.14 Conclusions  3.15 Problems  References4. Meso-micromachining  4.1 Introduction  4.2 Size Effects in Micromachining  4.3 Mechanism for Large Plastic Flow  4.4 Inhomogeneous Microstrains  4.5 Origins of the Size Effect  4.6 Meso-machining Processes  4.7 Problems  References5. Mechanical Micromachining  5.1 Introduction  5.2 Microfluidic Systems  5.3 Theory of Micromachining  5.4 Experimental Micromachining  5.5 Micromachining Tool Design  5.6 High-Speed Air Turbine Spindles  5.7 Mechanical Design of Rotors  5.8 Discussion  5.9 Conclusions  5.10 Future Developments  5.11 Problems  References6. Microgrinding  6.1 Introduction  6.2 Grinding Wheels  6.3 Conventional Grinding Processes  6.4 Precision Grinding Processes  6.5 Ultra Precision Grinding  6.6 Conclusions  6.7 Problems  References7. Diamond Micro Cutting Tools  7.1 Introduction  7.2 Properties of Diamond  7.3 History of Diamond  7.4 CVD Diamond Technology  7.5 CVD Diamond Processes  7.6 Treatment of Substrate  7.7 Modification of HFCVD Process  7.8 Nucleation and Growth  7.9 Deposition on 3-D Substrates  7.10 Wear of Diamond  7.11 Time-Modulated CVD Diamond  7.12 Conclusions  7.13 Problems  References8. Laser Micro- and NanofabricaUon  6.1 Introduction  8.2 Laser Fundamentals  8.3 Laser Microfabrication  8.4 Laser Nanofabrication  8.5 Conclusions  8.6 Problems  References9. Micromachining Using Water Droplets  9.1 Introduction  9.2 Theory of Pulsed Liquid Impact  9.3 Impact by Water Drops  9.4 Modeling Machining Thresholds  9.5 Comparative Results  9.6 Material Removal Rates  9.7 Design of Water-Based Tools  9.8 Analysis of Space Frame  9.9 Mode Shapes of Tetrahedral Structure  9.10 Conclusions  9.11 Problems  References10. Diamond Nanogrinding  10.1 Introduction  10.2 Piezoelectric Nanogrinding  10.3 Stress Analysis in Nanogrinding Grains  10.4 Fracture Dominated Wear Model  10.5 Nanogrinding  10.6 Porous Nanogrinding Tools  10.7 Laser Dressing of Tools  10.8 Future Directions  10.9 Problems  References11. Nanomachining  11.1 Introduction  11.2 Nanometric machining  11.3 Theoretical Basis of Nanomachining  11.4 Implementation  11.5 Conclusions  11.6 Problems  References12. Micro- and Nanomanufacturing  12.1 Introduction  12.2 Micromanufacturing  12.3 Nanomanufacturing  12.4 Commercialization Issues of Micro and Nanotechnologies  12.5 Future Developments  12.6 Problems  ReferencesSubject Index

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