出版時間:2007-1 出版社:工程技術(shù)出版分社 作者:浮田 頁數(shù):250
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內(nèi)容概要
光學(xué)MEMS是MEMS中的熱門領(lǐng)域,也是MEMS的重要發(fā)展方向之一。本書系統(tǒng)論述了光學(xué)MEMS和微機械光子學(xué),書中闡述了此領(lǐng)域的理論及實驗結(jié)構(gòu),并且介紹了多種器件及其應(yīng)用。內(nèi)容涉及激光二極管、共振傳感器、光鑷子等多種器件,最后,對微機械光子學(xué)的未來發(fā)展做了展望。 本書內(nèi)容豐富,系統(tǒng)闡述了光學(xué)MEMS,可供從事此領(lǐng)域的學(xué)生及工程技術(shù)人員參考。
作者簡介
作者:(日)浮田
書籍目錄
Preface1 From Optical MEMS to Micromechanical Photonics 1.1 Micromechanical Photonics-An Emerging Technology 1.2 Fabrication Methods 1.2.1 Bulk and Surface Micromachining 1.2.2 Three-Dimensional Micromachining 1.2.3 Monolithic Integration-Micromachining for and LD 1.3 Miniaturized Systems with Microoptics and Micromechanics 1.3.1 Important Aspects for Miniaturization 1.3.2 Light Processing by Micromechanics 1.3.3 Kinetic Energy of Light 1.3.4 Micromechanical Control by Optical Pressure 1.4 Integrated Systems with LDs and Micromechanics 1.4.1 Tunable LD 1.4.2 Resonant Sensor 1.4.3 Optical Encoder 1.4.4 Integrated Flying Optical Head 1.4.5 Blood Flow Sensor 1.5 Future Outlook of Optical MEMS and Micromechanical Photonics2 Extremely Short-External-Cavity Laser Diode 2.1 Background 2.2 Theoretical Analysis 2.2.1 Lasing Condition of a Solitary LD 2.2.2 Effective Reflectivity 2.2.3 Light Output 2.2.4 Wavelength 2.3 Experimental Analysis 2.3.1 Experimental Setup 2.3.2 Light Output 2.3.3 Wavelength and Spectrum Characteristics 2.4 Applications 2.4.1 Tunable LD …… 2.5 Designs for Related Problems of an ESEC LD3 Optical Tweezers 3.1 Background 3.2 Theoretical Analysis 3.3 Experimental Measurement and COmparison 3.4 Applications of Optical Tweezers4 Optical Rotor 4.1 Background 4.2 Theoretical Analysis Ⅰ-Optical Torque 4.3 THeoretical Analysis Ⅱ-Fluid Dynamics 4.4 Fabrication 4.5 Evaluation 4.6 Mixer Application for U-TAS5 Near Field 5.1 Background 5.2 Theoretical Analysis 5.3 Experimental Analysis 5.4 Future Applications6 Answers Hints and SolutionsReferencesIndex
編輯推薦
《微機械光子學(xué)(影印版)》內(nèi)容豐富,系統(tǒng)闡述了光學(xué)MEMS,可供從事此領(lǐng)域的學(xué)生及工程技術(shù)人員參考。
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